KGS Revises High-Pressure Gas Rules for EUV Equipment in Korea
20. August 2026Korea Gas Safety Corporation (KGS) has revised its approach to high-pressure gas safety requirements for EUV semiconductor equipment in Korea. The regulatory changes are intended to streamline the introduction of extreme ultraviolet (EUV) lithography systems while maintaining appropriate gas safety controls for equipment used in semiconductor manufacturing.
KGS recently discussed the revised framework and future cooperation on semiconductor gas safety with ASML Korea. The discussions focused on making high-pressure gas safety management requirements more practical and supporting the stable development of Korea’s semiconductor industry.
EUV semiconductor equipment involving high-pressure gas systems requires KGS certification in order to be approved for import and sale in Korea.
EUV Equipment Reclassified Under High-Pressure Gas Rules
KGS has been working to address regulatory difficulties encountered when importing EUV lithography equipment, which is a key technology used in advanced semiconductor production. Its measures have included changes to inspection procedures as well as recognition of new material specifications relating to materials and thicknesses.
A significant change concerns the regulatory classification of EUV equipment. Such equipment was previously categorized as a “high-pressure gas manufacturing facility” but is now classified as “high-pressure gas specified equipment.”
The revised classification provides greater flexibility regarding where required inspections can be performed. In addition to inspections at installation sites in Korea, inspections may now also be conducted at overseas manufacturing locations. This is expected to simplify the compliance and import process for EUV systems manufactured outside Korea.
According to KGS, the regulatory improvements could reduce the time required to introduce EUV equipment into Korea from more than one month to approximately 10 days.
Implications for Semiconductor Equipment Market Access
The revised KGS requirements are expected to reduce administrative and scheduling burdens for semiconductor companies importing EUV lithography systems into Korea. Manufacturers and suppliers should nevertheless assess how the new classification affects applicable inspection procedures, technical documentation, material specifications, and other KGS compliance requirements before equipment is shipped or installed.
KGS and ASML Korea also agreed on the importance of continued cooperation to ensure the safety of high-pressure gas equipment used in semiconductor manufacturing. The parties plan to maintain communication focused on practical conditions at semiconductor production sites.
KGS stated that regulatory requirements should be rationalized where appropriate when a sound technical basis for safety is maintained. The authority also emphasized that gas safety will remain its primary consideration while it continues discussions with industry on regulatory improvements supporting Korea’s semiconductor and gas sectors.
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